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    Title :

    Electrostatically Loaded Polysilicon MEMS Fracture Device with Sharp Crack


    Contributors:

    Conference:

    International conference; 2nd, Integrated micro/nanotechnology for space applications ; 1999 ; Pasadena, CA



    Publication date :

    1999-01-01


    Size :

    6 pages


    Remarks:

    Also known as MNT99


    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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