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    Title :

    An experimental analysis of electrostatically vibrated array of polysilicon cantilevers


    Contributors:

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 16 , 12 ; 2131-2145


    Publication date :

    2010-01-01


    Size :

    15 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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