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    Titel :

    Electrostatically Loaded Polysilicon MEMS Fracture Device with Sharp Crack


    Beteiligte:
    Tayebi, N. (Autor:in) / Kahn, H. (Autor:in) / Ballarini, R. (Autor:in) / Mullen, R. L. (Autor:in) / Heuer, A. H. (Autor:in) / Aerospace Corporation

    Kongress:

    International conference; 2nd, Integrated micro/nanotechnology for space applications ; 1999 ; Pasadena, CA



    Erscheinungsdatum :

    01.01.1999


    Format / Umfang :

    6 pages


    Anmerkungen:

    Also known as MNT99


    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




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