System for testing integrated circuits uses photoexcitation to determine quality of internal elements inaccessible to electrical tests. Approach prevents direct monitoring of internal operation of circuit by measurements at external terminals and is superior to electron beam scanning due to nondestructiveness.


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    Titel :

    Testing integrated circuits by photoexcitation


    Beteiligte:
    Erickson, J. J. (Autor:in) / Levy, M. E. (Autor:in)

    Erschienen in:

    Erscheinungsdatum :

    01.03.1979



    Medientyp :

    Sonstige


    Format :

    Keine Angabe


    Sprache :

    Englisch




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