Optical spot-raster scanner produces weighted photoresponse image (PI) of operating CMOS IC. Digital analysis of PI's, which correlates differences in PI's with electrical behavior of IC, shows promise both as 100-percent screening method for use in IC manufacture and as diagnostic tool in IC development.


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    Titel :

    Optical Testing of Integrated Circuits


    Beteiligte:
    Erickson, J. (Autor:in)

    Erschienen in:

    Erscheinungsdatum :

    1984-11-01



    Medientyp :

    Sonstige


    Format :

    Keine Angabe


    Sprache :

    Englisch




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