System for testing integrated circuits uses photoexcitation to determine quality of internal elements inaccessible to electrical tests. Approach prevents direct monitoring of internal operation of circuit by measurements at external terminals and is superior to electron beam scanning due to nondestructiveness.


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    Title :

    Testing integrated circuits by photoexcitation


    Contributors:

    Published in:

    Publication date :

    1979-03-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English




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