Development of high aspect ratio X-ray parabolic compound refractive lens at Indus-2 using X-ray lithography
MICROSYSTEM TECHNOLOGIES ; 20 , 10-11 ; 2055-2060
01.01.2014
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Fabrication of high aspect ratio comb-drive actuator using deep X-ray lithography at Indus-2
British Library Online Contents | 2014
|Fabrication of high aspect ratio nano gratings using SR lithography
British Library Online Contents | 2007
|British Library Online Contents | 2004
|Soft X-ray lithography of high aspect ratio SU8 submicron structures
British Library Online Contents | 2008
|High throughput projection UV lithography of high-aspect-ratio thick SU-8 microstructures
British Library Online Contents | 2008
|