Laser machine scans wafers for contaminating particles which cause open circuits, short circuits, and other defects in integrated circuits and transfers good wafers to integrated circuit processing equipment. Machine is faster and more accurate than human operator using lightfield/dark field microscope.


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    Title :

    Automatic inspection of silicon wafers


    Contributors:
    Martin, M. (author)

    Published in:

    Publication date :

    1980-04-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English


    Keywords :


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