Laser machine scans wafers for contaminating particles which cause open circuits, short circuits, and other defects in integrated circuits and transfers good wafers to integrated circuit processing equipment. Machine is faster and more accurate than human operator using lightfield/dark field microscope.
Automatic inspection of silicon wafers
NASA Tech Briefs ; 4 , 3
1980-04-01
Sonstige
Keine Angabe
Englisch
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