The results presented in this paper clearly show that a combination of precision engineering methods with LIGA is a stable and reproducible fabrication technique to realize polymer waveguide components with a very good optical performance. Due to the fact that the production method allows for cost-effective fabrication of high numbers and a integration of many channels, this star coupler and similar components are ideal candidates for highly parallel datacom applications, such as in high-end computer backplanes.
Integrated optical waveguide components fabricated by LIGA technique
1999-01-01
180512 byte
Conference paper
Electronic Resource
English
Integrated Optical Waveguide Components Fabricated by LIGA Technique
British Library Conference Proceedings | 1999
|Micro-optical and optomechanical systems fabricated by the LIGA technique (Invited Paper) [3008-31]
British Library Conference Proceedings | 1997
|A micro cycloid-gear system fabricated by multi-exposure LIGA technique
British Library Online Contents | 2000
|Mixer slit plates fabricated by direct-LIGA
British Library Online Contents | 2008
|Characterization of gear pumps fabricated by LIGA
British Library Online Contents | 1998
|