The results presented in this paper clearly show that a combination of precision engineering methods with LIGA is a stable and reproducible fabrication technique to realize polymer waveguide components with a very good optical performance. Due to the fact that the production method allows for cost-effective fabrication of high numbers and a integration of many channels, this star coupler and similar components are ideal candidates for highly parallel datacom applications, such as in high-end computer backplanes.


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    Title :

    Integrated optical waveguide components fabricated by LIGA technique


    Contributors:
    Paatzsch, T. (author) / Bauer, H.-D. (author) / Gaudron, A. (author) / Jobst, B. (author) / Stadler, S. (author) / Popp, M. (author) / Smaglinski, I. (author) / Ehrfeld, W. (author)


    Publication date :

    1999-01-01


    Size :

    180512 byte





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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