The results presented in this paper clearly show that a combination of precision engineering methods with LIGA is a stable and reproducible fabrication technique to realize polymer waveguide components with a very good optical performance. Due to the fact that the production method allows for cost-effective fabrication of high numbers and a integration of many channels, this star coupler and similar components are ideal candidates for highly parallel datacom applications, such as in high-end computer backplanes.


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    Titel :

    Integrated optical waveguide components fabricated by LIGA technique


    Beteiligte:
    Paatzsch, T. (Autor:in) / Bauer, H.-D. (Autor:in) / Gaudron, A. (Autor:in) / Jobst, B. (Autor:in) / Stadler, S. (Autor:in) / Popp, M. (Autor:in) / Smaglinski, I. (Autor:in) / Ehrfeld, W. (Autor:in)


    Erscheinungsdatum :

    01.01.1999


    Format / Umfang :

    180512 byte





    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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