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    Title :

    A micro cycloid-gear system fabricated by multi-exposure LIGA technique


    Contributors:
    Chung, S. J. (author) / Hein, H. (author) / Hirata, T. (author) / Mohr, J. (author) / Akashi, T. (author)

    Published in:

    Publication date :

    2000-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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