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    Title :

    Mixer slit plates fabricated by direct-LIGA


    Contributors:
    Bednarzik, M. (author) / Waberski, C. (author) / Rudolph, I. (author) / Löchel, B. (author) / Herbstritt, F. (author) / Ahrens, G. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 9-11 ; 1765-1770


    Publication date :

    2008-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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