We demonstrate a large-aperture, angle-insensitive MEMS modulator that switches from flat to a reflective microlens array. We measure 10 dB contrast with 0.55 /spl mu/m sag, and calculate 0.8 /spl mu/m sag will produce 20 dB contrast.


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    Title :

    Deformable MEMS micromirror array for wavelength and angle insensitive retroreflecting modulators


    Contributors:
    Chan, T.K. (author) / Ford, J.E. (author)


    Publication date :

    2004-01-01


    Size :

    133908 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



    Deformable MEMS Micromirror Array for Wavelength and Angle Insensitive Retro-Reflecting Modulators

    Lasers and Electro-optics Society (Institute of Electrical and Electronics Engineers) | British Library Conference Proceedings | 2004


    Retroreflecting Optical Modulator Using an MEMS Deformable Micromirror Array

    Chan, T. K. / Ford, J. E. | British Library Online Contents | 2006