We demonstrate a large-aperture, angle-insensitive MEMS modulator that switches from flat to a reflective microlens array. We measure 10 dB contrast with 0.55 /spl mu/m sag, and calculate 0.8 /spl mu/m sag will produce 20 dB contrast.
Deformable MEMS micromirror array for wavelength and angle insensitive retroreflecting modulators
The 17th Annual Meeting of the IEEELasers and Electro-Optics Society, 2004. LEOS 2004. ; 2 ; 1007-1008 Vol.2
2004-01-01
133908 byte
Conference paper
Electronic Resource
English
Deformable MEMS Micromirror Array for Wavelength and Angle Insensitive Retro-Reflecting Modulators
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