We demonstrate a large-aperture, angle-insensitive MEMS modulator that switches from flat to a reflective microlens array. We measure 10 dB contrast with 0.55 /spl mu/m sag, and calculate 0.8 /spl mu/m sag will produce 20 dB contrast.


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    Titel :

    Deformable MEMS micromirror array for wavelength and angle insensitive retroreflecting modulators


    Beteiligte:
    Chan, T.K. (Autor:in) / Ford, J.E. (Autor:in)


    Erscheinungsdatum :

    01.01.2004


    Format / Umfang :

    133908 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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