We present that a sub-diffraction-limited photolithography technique can be theoretically achieved by affiliating an anisotropic metamaterial under the conventional photolithographic mask. Based on the special dispersion characteristics of the metamaterial, only the enhanced evanescent waves with high spatial frequencies can transmit through the metamaterial and engage in the lithography process. Rigorous coupled wave analysis shows that with 442nm exposure light, one-dimensional periodical structures of 40nm feature can be patterned, far beyond the diffraction limit. This technique provides an alternative method to fabricate large-area nanostructures.
Interference photolithography with metamaterials
2008-12-01
496520 byte
Conference paper
Electronic Resource
English
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