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    Title :

    DTuD35 Refractive microlens arrays for photolithography


    Contributors:
    Eisner, M. (author) / Ossmann, C. (author) / Voelkel, R. (author) / Feick, E. (author) / Kaiser, P. (author) / Seider, S. (author) / Weck, S. (author) / Weible, K. (author)

    Conference:

    Conference, Diffractive optics and micro-optics ; 2000 ; Quebec City, Canada



    Publication date :

    2000-01-01


    Size :

    3 pages


    Remarks:

    Also known as DOMO 2000




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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    Testing of Microlens Arrays

    Lau, H. W. / McCormick, M. / Institute of Physics; Applied Optics Division et al. | British Library Conference Proceedings | 1994


    Preshaping photoresist for refractive microlens array fabrication

    Rubico Jay, Theresa / Stern, Margaret B. | SPIE | 1993


    Compact self-aligning assemblies with refractive microlens arrays made by contactless embossing [3289-03]

    Schulze, J. / Ehrfeld, W. / Mueller, H. et al. | British Library Conference Proceedings | 1998


    Monolithically integrated refractive microlens standing perpendicular to the substrate [2687-21]

    King, C. R. / Lin, L.-Y. / Wu, M. C. et al. | British Library Conference Proceedings | 1996