GaInAsP surfaces were investigated by contact angle measurement of a water droplet to estimate their hydrophilicity. The most hydrophilic surface of GaInAsP was obtained by the O/sub 2/ plasma activation process. Wafer direct bonding was successfully achieved between O/sub 2/ plasma activated GaInAsP and garnet crystals.
Contact angle measurement of GaInAsP surfaces for wafer direct bonding with garnet crystals
1999-01-01
158375 byte
Conference paper
Electronic Resource
English
Wafer Surface Treatment for Bonding GaInAsP and Magnetooptic Garnet
British Library Conference Proceedings | 1999
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British Library Online Contents | 2006
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