GaInAsP surfaces were investigated by contact angle measurement of a water droplet to estimate their hydrophilicity. The most hydrophilic surface of GaInAsP was obtained by the O/sub 2/ plasma activation process. Wafer direct bonding was successfully achieved between O/sub 2/ plasma activated GaInAsP and garnet crystals.
Contact angle measurement of GaInAsP surfaces for wafer direct bonding with garnet crystals
01.01.1999
158375 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Wafer Surface Treatment for Bonding GaInAsP and Magnetooptic Garnet
British Library Conference Proceedings | 1999
|Direct bonding with on-wafer metal interconnections
British Library Online Contents | 2006
|