The damage threshold fluence (/spl sim/ 0.08 J/cm/sup 2/) and damage mechanism of extreme ultraviolet Sc/Si multilayer coatings irradiated by 46.9 nm laser pulses of nanosecond duration are reported.


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    Title :

    Damage of Sc/Si multilayer mirrors exposed to intense nanosecond 46.9 nm laser pulses


    Contributors:


    Publication date :

    2004-01-01


    Size :

    447179 byte



    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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