The damage threshold fluence (/spl sim/ 0.08 J/cm/sup 2/) and damage mechanism of extreme ultraviolet Sc/Si multilayer coatings irradiated by 46.9 nm laser pulses of nanosecond duration are reported.
Damage of Sc/Si multilayer mirrors exposed to intense nanosecond 46.9 nm laser pulses
Conference on Lasers and Electro-Optics, 2004. (CLEO). ; 1 ; 4 pp. vol.1
01.01.2004
447179 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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