The recording in PMMA of nanometer-size features from a Fresnel diffraction pattern utilising a very compact 46.9 nm capillary discharge laser is discussed.


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    Titel :

    Nano-patterning of PMMA using a /spl lambda/ = 46.9 nm table-top laser


    Beteiligte:
    Capeluto, M.G. (Autor:in) / Marconi, M.C. (Autor:in) / Ludena, S. (Autor:in) / Pietrasanta, L. (Autor:in) / Grisham, M. (Autor:in) / Reagan, B. (Autor:in) / Menoni, C.S. (Autor:in) / Rocca, J.J. (Autor:in)


    Erscheinungsdatum :

    01.01.2004


    Format / Umfang :

    171995 byte



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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