The recording in PMMA of nanometer-size features from a Fresnel diffraction pattern utilising a very compact 46.9 nm capillary discharge laser is discussed.


    Access

    Check access

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Nano-patterning of PMMA using a /spl lambda/ = 46.9 nm table-top laser


    Contributors:
    Capeluto, M.G. (author) / Marconi, M.C. (author) / Ludena, S. (author) / Pietrasanta, L. (author) / Grisham, M. (author) / Reagan, B. (author) / Menoni, C.S. (author) / Rocca, J.J. (author)


    Publication date :

    2004-01-01


    Size :

    171995 byte



    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



    Intensity distribution of a capillary-discharge 46.9 nm soft X-ray laser

    Zhao, Y. / Wu, H. / Xie, Y. et al. | British Library Online Contents | 2013


    Demonstration of a desk-top size 46.9 nm laser at 12 Hz repetition rate

    Heinbuch, S. / Grisham, M. / Martz, D. et al. | IEEE | 2005


    Damage of Sc/Si multilayer mirrors exposed to intense nanosecond 46.9 nm laser pulses

    Vaschenko, G. / Grisham, M. / Menoni, C.S. et al. | IEEE | 2004


    A Model for Plasma Formation in Reflective Axicon and Tube for a Proposed Ne- Like Argon Laser at 46.9 nm

    IEEE; Lasers and Electro-Optics Society | British Library Conference Proceedings | 1996


    Nano-patterning by laser interference lithography

    Xie, Q. / Hong, M.H. / Van, L.H. et al. | IEEE | 2003