The recording in PMMA of nanometer-size features from a Fresnel diffraction pattern utilising a very compact 46.9 nm capillary discharge laser is discussed.
Nano-patterning of PMMA using a /spl lambda/ = 46.9 nm table-top laser
Conference on Lasers and Electro-Optics, 2004. (CLEO). ; 2 ; 2 pp. vol.2
2004-01-01
171995 byte
Conference paper
Electronic Resource
English
Intensity distribution of a capillary-discharge 46.9 nm soft X-ray laser
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