The present invention relates to a magnetic levitation transfer apparatus and, more specifically, to a magnetic levitation transfer apparatus which is installed in a chamber used in a manufacturing process of a flat panel display such as a liquid crystal display device and transfers a substrate. According to an embodiment of the present invention, an electromagnet which levitates and supports a carrier is installed outside a chamber, a second core portion penetrating a chamber wall and coming in contact with the electromagnet is allowed to be adjacent to the carrier to secure the same electromagnetic force as that of the electromagnet, the electromagnet and components related thereto are disposed outside the chamber, and thus it is possible to solve a problem caused by out-gassing.

    본 발명은 자기부상 반송장치를 개시한다. 보다 상세하게는, 본 발명은 액정표시장치와 같은 평판표시장치의 제조공정에서 이용되는 챔버내에 설치되어 기판을 이송하는 자기부상 반송장치에 관한 것이다. 본 발명의 실시예에 따르면, 캐리어를 부상 및 지지하는 전자석을 챔버외부에 설치하고, 챔버벽을 관통하여 전자석과 접촉하는 제2 코어부를 캐리어에 인접시켜 전자석과 동일한 전자기력을 확보함에 따라, 전자석 및 이와 관련된 부품을 챔버외부로 배치시킴으로써, Out-gassing에 의한 문제를 해결할 수 있는 효과가 있다.


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    Title :

    MAGNETIC LEVITATION TRANSFER APPARATUS


    Additional title:

    자기부상 반송장치


    Contributors:

    Publication date :

    2016-06-10


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    Korean


    Classification :

    IPC:    B65G TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS , Transport- oder Lagervorrichtungen, z.B. Förderer zum Laden oder Abladen / B60L PROPULSION OF ELECTRICALLY-PROPELLED VEHICLES , Antrieb von elektrisch angetriebenen Fahrzeugen



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