To provide a wall surface travel device which is lighter and can be carried into or out from a furnace.SOLUTION: A wall surface travel device includes: a vacuum chamber having an opening which faces a furnace wall; a drive part which moves the vacuum chamber along the furnace wall; and an annular seal member which is disposed so as to spread from an edge part of the opening to the outer side; and a frame which supports and fixes the drive part to the vacuum chamber. The vacuum chamber, the drive part, the seal member, and the frame are detachably coupled to each other.SELECTED DRAWING: Figure 3
【課題】より軽量で、より容易に搬出入することが可能な壁面走行装置を提供する。【解決手段】壁面走行装置は、炉壁に対向する開口部を有する真空チャンバーと、真空チャンバーを炉壁に沿って移動させる駆動部と、開口部の縁部から外側に広がるように配置された環状のシール部材と、真空チャンバーに対して駆動部を支持固定するフレームと、を備え、真空チャンバー、駆動部、シール部材、及びフレームは互いに着脱可能に結合されている。【選択図】図3
WALL SURFACE TRAVEL DEVICE
壁面走行装置
2023-06-14
Patent
Electronic Resource
Japanese