To provide a wall surface travel device which achieves further improvement of seal performance and travel performance.SOLUTION: A wall surface travel device includes: a vacuum chamber having an opening which faces a furnace wall; a drive part which moves the vacuum chamber along the furnace wall; and an annular seal member which is disposed so as to spread from an edge part of the opening to the outer side. The seal member has: a bag-like seal body which may contact with the furnace wall; and a seal frame supporting the seal body on the vacuum chamber. The seal frame is attached so as to be movable in a direction orthogonal to the furnace wall relative to the vacuum chamber.SELECTED DRAWING: Figure 1
【課題】シール性能と走行性能がさらに向上した壁面走行装置を提供する。【解決手段】壁面走行装置は、炉壁に対向する開口部を有する真空チャンバーと、真空チャンバーを炉壁に沿って移動させる駆動部と、開口部の縁部から外側に広がるように配置された環状のシール部材と、を備え、シール部材は、炉壁に当接可能な袋状のシール本体と、シール本体を真空チャンバーに対して支持するシールフレームと、を有し、シールフレームは、真空チャンバーに対して炉壁に直交する方向に相対移動可能に取り付けられている。【選択図】図1
WALL SURFACE TRAVEL DEVICE
壁面走行装置
2023-06-14
Patent
Electronic Resource
Japanese