Access

    Check access

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Micromachined Aluminum Nitride Microphone Technology Development


    Contributors:

    Conference:

    50th AIAA Aerospace Sciences Meeting including the New Horizons Forum and Aerospace Exposition



    Publication date :

    2012-01-01




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English




    Micromachined Aluminum Nitride Microphone Technology Development

    Williams, M. / Griffin, B. / Reagan, T. et al. | British Library Conference Proceedings | 2012


    Development of a micromachined piezoelectric microphone for aeroacoustics applications

    Horowitz, Stephen / Nishida, Toshikazu / Cattafesta, Louis et al. | Tema Archive | 2007


    Design and Characterization of a Micromachined Piezoelectric Microphone

    Horowitz, Stephen / Nishida, Toshikazu / Cattafesta, Louis et al. | AIAA | 2005


    Design and Characterization of a Micromachined Piezoelectric Microphone AIAA Paper 2005-2998

    Horowitz, S. / Nishida, T. / Cattafesta, L. et al. | British Library Conference Proceedings | 2005


    Micromachined Bolometer-Arrays with Silicon-Nitride Membranes

    Kreysa, E. / Beeman, J. W. / Haller, E. E. | British Library Online Contents | 1996