Micromachined Aluminum Nitride Microphone Technology Development
50th, Aerospace sciences meeting; including the new horizons forum and aerospace exposition 2012 ; 2012 ; Nashville, TN
Aerospace sciences meeting; including the new horizons forum and aerospace exposition 2012 ; 3759-3768
2012-01-01
10 pages
Includes bibliographical references and index
Conference paper
English
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