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    Title :

    Micromachined Aluminum Nitride Microphone Technology Development



    Conference:

    50th, Aerospace sciences meeting; including the new horizons forum and aerospace exposition 2012 ; 2012 ; Nashville, TN



    Publication date :

    2012-01-01


    Size :

    10 pages


    Remarks:

    Includes bibliographical references and index



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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