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    Title :

    Micromachined Bolometer-Arrays with Silicon-Nitride Membranes


    Contributors:
    Kreysa, E. (author) / Beeman, J. W. (author) / Haller, E. E. (author)


    Publication date :

    1996-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    500.5 / 387.8