Zugriff

    Zugriff über TIB

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Titel :

    Micromachined Aluminum Nitride Microphone Technology Development



    Kongress:

    50th, Aerospace sciences meeting; including the new horizons forum and aerospace exposition 2012 ; 2012 ; Nashville, TN



    Erscheinungsdatum :

    2012-01-01


    Format / Umfang :

    10 pages


    Anmerkungen:

    Includes bibliographical references and index



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




    Micromachined Aluminum Nitride Microphone Technology Development

    Williams, Matthew / Griffin, Benjamin / Reagan, Tiffany et al. | AIAA | 2012


    Development of a micromachined piezoelectric microphone for aeroacoustics applications

    Horowitz, Stephen / Nishida, Toshikazu / Cattafesta, Louis et al. | Tema Archiv | 2007


    Design and Characterization of a Micromachined Piezoelectric Microphone

    Horowitz, Stephen / Nishida, Toshikazu / Cattafesta, Louis et al. | AIAA | 2005


    Micromachined Bolometer-Arrays with Silicon-Nitride Membranes

    Kreysa, E. / Beeman, J. W. / Haller, E. E. | British Library Online Contents | 1996


    Surface micromachined accelerometer:a technology update

    Payne,R.S. / Dinsmore,K.A. / Analog Devices Semiconductor,US | Kraftfahrwesen | 1991