Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Three-Dimensional Quantitative Surface Topography Measurement Using Modulated-Current Based Scanning Ion Conductance Microscopy


    Contributors:
    Guo, Renfei (author) / Zhuang, Jian (author) / Yu, Dehong (author)

    Published in:

    Publication date :

    2016-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    Unknown


    Classification :

    DDC:    500



    3-D Measurement by Intensity Modulated Moire Topography

    Lu, C. / Yamaguchi, A. / Inokuchi, S. | British Library Online Contents | 1998


    Wafer topography measurement by fast optical scanning deflectometry

    Krey, S. / Peter, F. / Dumitrescu, E. et al. | IEEE | 2003


    Surface topography by wavelength scanning interferometry [3479-03]

    Yamaguchi, I. / Yamamoto, A. / Yano, M. et al. | British Library Conference Proceedings | 1998


    Clearance compensation method based on three-dimensional scanning measurement technology

    SHI LEI / HAN YE / LI FUJIA et al. | European Patent Office | 2024

    Free access