Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Micro cam system driven by electrostatic comb-drive actuators based on SOI-MEMS technology


    Contributors:
    Pham, P. H. (author) / Dinh, T. K. (author) / Dang, L. B. (author) / Nguyen, K. T. (author) / Dao, D. V. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 21 , 3 ; 699-706


    Publication date :

    2015-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Micro robot system with moving micro-car driven by electrostatic comb-drive actuators

    Pham, P. H. / Dang, L. B. / Vu, H. N. | British Library Online Contents | 2010


    A method to measure the micro-capacitance for MEMS comb actuators

    Zhanshe, G. / Le, C. / Jinliang, W. et al. | British Library Online Contents | 2011


    Electrostatic comb-drive actuators made of polyimide for actuating micromotion convert mechanisms

    Kamiya, D. / Hayama, T. / Horie, M. | British Library Online Contents | 1999



    Piezoelectric micro-actuators for RF-MEMS switches

    Kanno, I. / Hironobu Endo, / Suzuki, T. et al. | IEEE | 2005