Micro robot system with moving micro-car driven by electrostatic comb-drive actuators
MICROSYSTEM TECHNOLOGIES ; 16 , 4 ; 505-510
2010-01-01
6 pages
Article (Journal)
English
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Micro cam system driven by electrostatic comb-drive actuators based on SOI-MEMS technology
British Library Online Contents | 2015
|Electrostatic comb-drive actuators made of polyimide for actuating micromotion convert mechanisms
British Library Online Contents | 1999
|A method to measure the micro-capacitance for MEMS comb actuators
British Library Online Contents | 2011
|British Library Online Contents | 2008
|High aspect ratio electrostatic micro actuators using LIGA process
British Library Online Contents | 2000
|