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    Title :

    Electrostatic comb-drive actuators made of polyimide for actuating micromotion convert mechanisms


    Contributors:
    Kamiya, D. (author) / Hayama, T. (author) / Horie, M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 5 , 4 ; 161-165


    Publication date :

    1999-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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