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    Title :

    Potential of BPN as a new negative photoresist for a very thick layer with high aspect ratio


    Contributors:
    Bourrier, D. (author) / Ghannam, A. (author) / Dilhan, M. (author) / Granier, H. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 20 , 10-11 ; 2089-2096


    Publication date :

    2014-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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