Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Infrared heated μ-blistering, a new fabrication technology for HARMST


    Contributors:
    Schmidt, T. (author) / Mueller, C. (author) / Reinecke, H. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 20 , 10-11 ; 2017-2022


    Publication date :

    2014-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Commercialising HARMST-LIGA technologies

    Tolfree, D. | British Library Online Contents | 2008


    Sidewall slopes and roughness of SU-8 HARMST

    Vora, K. D. / Shew, B. Y. / Lochel, B. et al. | British Library Online Contents | 2008


    Sidewall slopes and roughness of SU-8 HARMST

    Vora, K. D. / Shew, B. Y. / Lochel, B. et al. | British Library Online Contents | 2008


    Special issue of the 8th International Workshop on High Aspect Ratio Micro Structure Technology, HARMST 2009

    Achenbach, S. / Klymyshyn, D. / Michel, B. | British Library Online Contents | 2010


    HARMST, High Aspect Ratio Micro Structure Technology Workshop, Gyenogju, Korea, 10–13 June 2005

    Kwon, T. H. / Michel, B. | British Library Online Contents | 2007