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    Title :

    Sidewall slopes and roughness of SU-8 HARMST


    Contributors:
    Vora, K. D. (author) / Shew, B. Y. (author) / Lochel, B. (author) / Harvey, E. C. (author) / Hayes, J. P. (author) / Peele, A. G. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 9-11 ; 1777


    Publication date :

    2008-01-01


    Size :

    1777 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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