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    Title :

    Special issue of the 8th International Workshop on High Aspect Ratio Micro Structure Technology, HARMST 2009


    Contributors:
    Achenbach, S. (author) / Klymyshyn, D. (author) / Michel, B. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 16 , 8-9 ; 1285


    Publication date :

    2010-01-01


    Size :

    1285 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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