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    Title :

    Special issue of the 9th high-aspect-ratio micro-structure technology workshop, HARMST 2011, in Hsinchu, Taiwan, June 12–18, 2011


    Contributors:
    Fu, C. C. (author) / Michel, B. (author)

    Published in:

    Publication date :

    2013-01-01


    Size :

    299 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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