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    Title :

    Special issue of the high-aspect-ratio micro-structure technology workshop, HARMST’07, Besançon, France, 7–9 June 2007


    Contributors:
    Khan Malek, C. (author) / Saile, V. (author) / Michel, B. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 9-11 ; 1215-1216


    Publication date :

    2008-01-01


    Size :

    2 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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