Electrothermal-driven gap adjustable MEMS comb structure: modeling and simulation of the equivalent circuit macromodel
MICROSYSTEM TECHNOLOGIES ; 20 , 6 ; 1205-1212
2014-01-01
8 pages
Article (Journal)
English
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Fiber-Pigtailed Electrothermal MEMS Iris VOA
British Library Online Contents | 2007
|A MEMS VOA Using Electrothermal Actuators
British Library Online Contents | 2007
|A refined electrical macromodel for power MOS transistors
Tema Archive | 1995
|Electrothermal actuators for integrated MEMS safe and arming devices
Tema Archive | 2010
|