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    Title :

    Electrothermal-driven gap adjustable MEMS comb structure: modeling and simulation of the equivalent circuit macromodel


    Contributors:
    Pu, X. (author) / Li, W. (author) / Zhou, Z. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 20 , 6 ; 1205-1212


    Publication date :

    2014-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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