The invention discloses an electric heating type MEMS micro-thruster which comprises a thin-film resistor heating unit and a silicon-based micro-channel unit, the thin-film resistor heating unit comprises a glass sheet and a heating wire, the silicon-based micro-channel unit comprises a silicon wafer, and the glass sheet is tightly attached to the silicon wafer; the heating wire is arranged on the surface, facing the silicon wafer, of the glass sheet, a fluid inlet is formed in one end of the surface, facing the glass sheet, of the silicon wafer, the surface, facing the glass sheet, of the silicon wafer is etched to form an inlet fluid buffer area, a heating chamber, a micro nozzle and a lead hole, and a fluid flow channel is etched in the bottom surface of the heating chamber; fluid can enter through the fluid inlet and enter the fluid flow channel on the heating chamber through the inlet fluid buffer area, the fluid is heated by the heating wire through the fluid flow channel and then sprayed out through the micro nozzle to generate thrust, the heating wire is connected with the power source through a wire, and the wire penetrates through the wire leading hole. The thruster is small in size, light in weight, compact in structure and high in integration level, the specific impulse of the thruster can be effectively improved, and the service life of the thruster is prolonged.

    本发明公开了一种电热式MEMS微推力器,包括薄膜电阻加热单元及硅基微流道单元,薄膜电阻加热单元包括玻璃片、加热丝,硅基微流道单元包括硅片,玻璃片与所述硅片紧密贴合;加热丝设置于玻璃片上朝向硅片的面上,硅片朝向玻璃片的面的一端处开设有流体入口,硅片朝向玻璃片的面上刻蚀形成有入口流体缓冲区、加热室、微喷口以及引线孔,加热室的底面上刻蚀有流体流道,流体能够通过流体入口进入并通过入口流体缓冲区进入加热室上的流体流道,通过流体流道被加热丝加热后通过微喷口喷出产生推力,加热丝与电源通过导线连接,导线穿过引线孔。本发明体积小、质量轻、结构紧凑、集成度高,能有效提升推力器的比冲,延长了推力器的寿命。


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    Title :

    Electrothermal MEMS micro-thruster


    Additional title:

    一种电热式MEMS微推力器


    Contributors:
    ZHANG XIANG (author) / WANG ZHONGHUI (author) / LI JINGGUANG (author) / LIAO WENHE (author) / LIANG ZHENHUA (author) / ZHOU HANG (author)

    Publication date :

    2022-06-17


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    Chinese


    Classification :

    IPC:    B64G Raumfahrt , COSMONAUTICS



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