The use of electrothermal actuators to achieve the necessary motion of a MEMS based safe and arming device was thoroughly explored. Multiple variants of thermal actuators were designed, modeled, fabricated, and tested in order to gain a better understanding of their specific characteristics. Design variations included both single and double hot arm actuators as well as bent beam thermal actuators. Studies were performed to analyze and compare the displacement and output force of these actuators both as standalone devices as well as multiple actuators joined together. Detailed analysis of the results of the modeling and testing demonstrated the advantages and disadvantages of each style of thermal actuator. Furthermore, the specific variant of electrothermal actuator that is best suited for implementation into MEMS based safe and arming devices can be effectively determined. Finally, detailed analysis of the performance of electrothermal actuators integrated into a functioning MEMS safe and arm device will be presented. Methods in which these actuators are incorporated to best take advantage of their particular characteristics is shown as well as methods that were incorporated in order to overcome some of the shortcomings inherent with these actuators in order to provide the overall safe and arming device with reliable and efficient performance.
Electrothermal actuators for integrated MEMS safe and arming devices
Elektrothermische Aktoren für integrierte MEMS-basierte Sicherheits- und Waffenausrüstung
2010
8 Seiten, 20 Bilder, 4 Tabellen, 8 Quellen
Conference paper
English
A MEMS VOA Using Electrothermal Actuators
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