Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Pre-bond megasonic cleaning with improved process control


    Contributors:
    Dussault, D. (author) / Liebscher, E. (author) / Fournel, F. (author) / Payen, N. (author) / Dragoi, V. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 20 , 4/5 ; 545-550


    Publication date :

    2014-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Megasonic agitation for enhanced electrodeposition of copper

    Kaufmann, J. G. / Desmulliez, M. P. / Tian, Y. et al. | British Library Online Contents | 2009


    Fabricating HARMS by using megasonic assisted electroforming

    Liu, G. / Huang, X. / Xiong, Y. et al. | British Library Online Contents | 2008


    Application of megasonic cleaner to sub-micron particles of SIL optical flying head

    Kim, N. / Kim, S. | British Library Online Contents | 2003


    Electrodeposition of copper into high aspect ratio PCB micro-via using megasonic agitation

    Costello, S. / Strusevich, N. / Flynn, D. et al. | British Library Online Contents | 2013