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    Title :

    Fabrication of electrostatic MEMS microactuator based on X-ray lithography with Pb-based X-ray mask and dry-film-transfer-to-PCB process


    Contributors:

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 20 , 1 ; 127-135


    Publication date :

    2014-01-01


    Size :

    9 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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