Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Development of Fabrication Process and Electrostatic Microactuator for a Mechanically Tunable 2-D Photonic Crystal


    Contributors:

    Conference:

    SYMPOSIUM D, Semiconductor photonics: nano-structured materials and devices ; 2007 ; Singapore



    Publication date :

    2008-01-01


    Size :

    3 pages


    Remarks:

    Includes bibliographical references and index; Held as part of the International conference on materials for advanced technologies (ICMAT) 2007




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Design and fabrication of a SU-8 based electrostatic microactuator

    Dai, W. / Lian, K. / Wang, W. | British Library Online Contents | 2007


    Integrated fabrication of electrostatic microactuator for HDD R/W head positioning

    Chen, J. / Lu, Y. / Yang, J. P. | British Library Online Contents | 2005


    Electrostatic Linear Microactuator Mechanism for Focusing a CCD Camera

    Koga, A. / Suzumori, K. / Sudo, H. et al. | British Library Online Contents | 1999


    Fabrication of electrostatic MEMS microactuator based on X-ray lithography with Pb-based X-ray mask and dry-film-transfer-to-PCB process

    Kerdlapee, P. / Wisitsoraat, A. / Phokaratkul, D. et al. | British Library Online Contents | 2014


    Optically Tunable Photonic Crystal Waveguides

    Masturzo, S.A. | Online Contents | 2009