Development of Fabrication Process and Electrostatic Microactuator for a Mechanically Tunable 2-D Photonic Crystal
SYMPOSIUM D, Semiconductor photonics: nano-structured materials and devices ; 2007 ; Singapore
01.01.2008
3 pages
Includes bibliographical references and index; Held as part of the International conference on materials for advanced technologies (ICMAT) 2007
Aufsatz (Konferenz)
Englisch
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Design and fabrication of a SU-8 based electrostatic microactuator
British Library Online Contents | 2007
|Integrated fabrication of electrostatic microactuator for HDD R/W head positioning
British Library Online Contents | 2005
|Electrostatic Linear Microactuator Mechanism for Focusing a CCD Camera
British Library Online Contents | 1999
|British Library Online Contents | 2014
|Optically Tunable Photonic Crystal Waveguides
Online Contents | 2009
|