Integrated fabrication of electrostatic microactuator for HDD R/W head positioning
JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment, Yokohama, 2003 ; 8/10 ; 612-615
MICROSYSTEM TECHNOLOGIES ; 11 , 8/10
2005-01-01
4 pages
Article (Journal)
English
DDC: | 629.83 |
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