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    Title :

    A THRESHOLD MODEL FOR LASER CLEANING OF LARGER SILICON WAFERS


    Contributors:
    Wang, X. (author) / Kang, R. (author) / Xu, W. (author) / Guo, D. (author) / Wang, J. (author)

    Published in:

    Publication date :

    2011-01-01


    Size :

    14 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    671.35



    A THRESHOLD MODEL FOR LASER CLEANING OF LARGER SILICON WAFERS

    Wang, Xuyue / Kang, Renke / Xu, Wenji et al. | British Library Online Contents | 2011



    Smoother Scribing of Silicon Wafers

    Danyluk, S. | NTRS | 1986


    Reciprocating Saw for Silicon Wafers

    Morrison, A. D. / Collins, E. R., Jr. | NTRS | 1985


    Automated Texturization of Silicon Wafers

    Chitre, S. / Snyder, C. / Jones, G. et al. | NTRS | 1985