Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    A THRESHOLD MODEL FOR LASER CLEANING OF LARGER SILICON WAFERS


    Contributors:
    Wang, Xuyue (author) / Kang, Renke (author) / Xu, Wenji (author) / Guo, Dongming (author) / Wang, Jun (author)

    Published in:

    Publication date :

    2011-01-01


    Size :

    14 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    671.3505



    A THRESHOLD MODEL FOR LASER CLEANING OF LARGER SILICON WAFERS

    Wang, X. / Kang, R. / Xu, W. et al. | British Library Online Contents | 2011



    Smoother Scribing of Silicon Wafers

    Danyluk, S. | NTRS | 1986


    Reciprocating Saw for Silicon Wafers

    Morrison, A. D. / Collins, E. R., Jr. | NTRS | 1985


    Automated Texturization of Silicon Wafers

    Chitre, S. / Snyder, C. / Jones, G. et al. | NTRS | 1985